Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices
نویسندگان
چکیده
منابع مشابه
Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices.
We describe a technique for surface and subsurface micromachining of glass substrates by using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. A salient feature of pulsed laser micromachining is its ability to drill subsurface tunnels into glass substrates. To demonstrate a potential application of this micromachining technique, we fabricate simple microfluidic structures o...
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Using tightly focused femtosecond laser pulses of just 5 nJ, we produce optical breakdown and structural change in bulk transparent materials and demonstrate micromachining of transparent materials by use of unamplified lasers. We present measurements of the threshold for structural change in Corning 0211 glass as well as a study of the morphology of the structures produced by single and multip...
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The use of low-energy femtosecond laser beam combined with chemical etching has been proven to be an efficient method to fabricate three-dimensional structures in fused silica. For high-volume application, this technology--like other serial processes--suffers from a moderate production rate. Here, we show that femtosecond laser can also be employed to fabricate silica molds and other patterned ...
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2004
ISSN: 0003-6935,1539-4522
DOI: 10.1364/ao.43.004584